Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy

Dong Ryul Kwak, Sun Hee Kim, Ik Keun Park, Judith Todd Copley, Chiaki Miyasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Ultrasonic-Atomic Force Microscopy (U-AFM) was applied to determine the feasibility of visualizing interior features in an ultra-thin film system. As the amplitude and phase of the cantilever resonance frequency changes with local contact stiffness, U-AFM can obtain both surface and subsurface topographic and elastic images. Specimens with nanostructured silicon dioxide (SiO2) patterns deposited on silicon (111) surfaces were fabricated and covered with polymethyl methacrylate (PMMA) films with thicknesses of 800 nm and 1400 nm, respectively. While subsurface features were barely distinguishable beneath the 1400 nm film, 100 nm SiO2 features were clearly visualized for PMMA film thicknesses below and up to 800 nm. This research demonstrates the potential of U-AFM as a powerful technique for visualizing nanoscale subsurface features in microelectronic devices.

Original languageEnglish (US)
Title of host publicationNanosensors, Biosensors, and Info-Tech Sensors and Systems 2013
Volume8691
DOIs
StatePublished - 2013
EventNanosensors, Biosensors, and Info-Tech Sensors and Systems 2013 - San Diego, CA, United States
Duration: Mar 10 2013Mar 14 2013

Other

OtherNanosensors, Biosensors, and Info-Tech Sensors and Systems 2013
CountryUnited States
CitySan Diego, CA
Period3/10/133/14/13

Fingerprint

Atomic Force Microscopy
Atomic force microscopy
Interior
Visualization
ultrasonics
Ultrasonics
SiO2
atomic force microscopy
Polymethyl Methacrylate
Polymethyl methacrylates
polymethyl methacrylate
Silicon
Ultrathin films
Resonance Frequency
Cantilever
microelectronics
Microelectronics
Silicon Dioxide
Film thickness
Thin Films

All Science Journal Classification (ASJC) codes

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Kwak, D. R., Kim, S. H., Park, I. K., Todd Copley, J., & Miyasaka, C. (2013). Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy. In Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013 (Vol. 8691). [869117] https://doi.org/10.1117/12.2012244
Kwak, Dong Ryul ; Kim, Sun Hee ; Park, Ik Keun ; Todd Copley, Judith ; Miyasaka, Chiaki. / Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy. Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013. Vol. 8691 2013.
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Kwak, DR, Kim, SH, Park, IK, Todd Copley, J & Miyasaka, C 2013, Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy. in Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013. vol. 8691, 869117, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, San Diego, CA, United States, 3/10/13. https://doi.org/10.1117/12.2012244

Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy. / Kwak, Dong Ryul; Kim, Sun Hee; Park, Ik Keun; Todd Copley, Judith; Miyasaka, Chiaki.

Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013. Vol. 8691 2013. 869117.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Kwak DR, Kim SH, Park IK, Todd Copley J, Miyasaka C. Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy. In Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013. Vol. 8691. 2013. 869117 https://doi.org/10.1117/12.2012244