Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy

Dong Ryul Kwak, Sun Hee Kim, Ik Keun Park, Judith Todd Copley, Chiaki Miyasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Ultrasonic-Atomic Force Microscopy (U-AFM) was applied to determine the feasibility of visualizing interior features in an ultra-thin film system. As the amplitude and phase of the cantilever resonance frequency changes with local contact stiffness, U-AFM can obtain both surface and subsurface topographic and elastic images. Specimens with nanostructured silicon dioxide (SiO2) patterns deposited on silicon (111) surfaces were fabricated and covered with polymethyl methacrylate (PMMA) films with thicknesses of 800 nm and 1400 nm, respectively. While subsurface features were barely distinguishable beneath the 1400 nm film, 100 nm SiO2 features were clearly visualized for PMMA film thicknesses below and up to 800 nm. This research demonstrates the potential of U-AFM as a powerful technique for visualizing nanoscale subsurface features in microelectronic devices.

Original languageEnglish (US)
Title of host publicationNanosensors, Biosensors, and Info-Tech Sensors and Systems 2013
Volume8691
DOIs
StatePublished - 2013
EventNanosensors, Biosensors, and Info-Tech Sensors and Systems 2013 - San Diego, CA, United States
Duration: Mar 10 2013Mar 14 2013

Other

OtherNanosensors, Biosensors, and Info-Tech Sensors and Systems 2013
CountryUnited States
CitySan Diego, CA
Period3/10/133/14/13

All Science Journal Classification (ASJC) codes

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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  • Cite this

    Kwak, D. R., Kim, S. H., Park, I. K., Todd Copley, J., & Miyasaka, C. (2013). Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy. In Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013 (Vol. 8691). [869117] https://doi.org/10.1117/12.2012244