Vlbrational characteristics of micro beams

Oladipo Onipede, Jr., Ilya Avdeev, Amir Khalilollahi, Lisa Buziewicz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Several high frequency MEMS devices such as resonators and filters can be modeled as electrostatically driven microbeams. While their static structural response depends solely on the magnitude of the applied voltage and their elastic stiffness, their dynamic response also depends on their mass, damping properties and the applied voltage frequency. In designing these devices, critical parameters must include the maximum voltage, voltage frequency and the natural frequency of the system. Even though the electrostatic force developed by the voltage is non-linear, the system can be modeled as a harmonic system due to the periodic nature of the response. Results from a non-linear structural-electrostatic dynamic model show the importance of the dynamic properties and the non-linear electrostatic force. The results show significantly lower limiting voltages, especially when the driving voltage is close to the natural frequency of the system. The effect of damping is also addressed.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Pages199-200
Number of pages2
StatePublished - Dec 1 2005
Event2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: Nov 5 2005Nov 11 2005

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Volume7 MEMS
ISSN (Print)1096-665X

Other

Other2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
CountryUnited States
CityOrlando, FL
Period11/5/0511/11/05

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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  • Cite this

    Onipede, Jr., O., Avdeev, I., Khalilollahi, A., & Buziewicz, L. (2005). Vlbrational characteristics of micro beams. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS (pp. 199-200). (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS; Vol. 7 MEMS).