Abstract
Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations. A single linear RLC circuit cannot completely capture the response of the resonator under double resonance excitation. Therefore, we develop a coupled mechanical and electrical mathematical linearized model at different operation frequencies and validate this model experimentally. The double-resonance excitation results in a 21 times amplification of the voltage across the resonator and 31 times amplitude amplification over classical excitation schemes. This intensive experimental study showed a great potential of double resonance excitation providing a high amplitude amplification and maintaining the linearity of the system when the parasitic capacitance is maintained low.
Original language | English (US) |
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Article number | 380 |
Journal | Sensors (Switzerland) |
Volume | 19 |
Issue number | 2 |
DOIs | |
State | Published - Jan 2 2019 |
All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Biochemistry
- Atomic and Molecular Physics, and Optics
- Instrumentation
- Electrical and Electronic Engineering