Wafer mapping of the transverse piezoelectric coefficient, e _31,f, using the wafer flexure technique with sputter deposited Pt strain gauges

Rudeger H.T. Wilke, Paul J. Moses, Pierre Jousse, Charles Yeager, Susan E. Trolier-McKinstry

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

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Physics & Astronomy

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Engineering & Materials Science