Water immersion of model photoresists: Interfacial influences on water concentration and surface morphology

Bryan D. Vogt, Christopher L. Soles, Chla Ying Wang, Vivek M. Prabhu, Patricia M. Mcguiggan, Jack F. Douglas, Eric K. Lin, Wen Li Wu, Sushil K. Satija, Darío L. Goldfarb, Marie Angelopoulos

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