Whispering gallery mode based on-chip glass microbubble resonator for thermal sensing

Chenchen Zhang, Alex Cocking, Eugene Freeman, Zhiwen Liu, Srinivas Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper reports the first experimental observations of whispering gallery mode (WGM) resonance in on-chip glass microbubble structures. Using microfabrication methods, chip-scale glass microbubbles with ultra-smooth surface and sub-micrometer wall thickness are shown to support optical resonance modes with ultra-high Q-factors of >107. The resonance is highly sensitive to temperature, with measured sensitivity of -1.8 GHz/°C. Based upon the signal to noise performance, this corresponds to a temperature resolution of 55 μΚ.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages630-633
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - Jul 26 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: Jun 18 2017Jun 22 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period6/18/176/22/17

All Science Journal Classification (ASJC) codes

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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    Zhang, C., Cocking, A., Freeman, E., Liu, Z., & Tadigadapa, S. (2017). Whispering gallery mode based on-chip glass microbubble resonator for thermal sensing. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 630-633). [7994128] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994128